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JHHG-HQ series SF6 mixed gas recovery and recharge purification separation filling device

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recommendation index：

Intelligent design, simple and convenient operation

Recovery and Rapid Separation of SF6/N2 Mixed Gas

Automatic recognition of cylinder status and automatic stop of filling

Large flow rate high precision mass flow controller

Device for rapid recovery, purification, separation and filling of sulfur hexafluoride mixed gas
It is mainly composed of gas circuit system, vacuum system, evaporation and gasification system, gas pretreatment system, gas recovery and separation system, refrigeration liquefaction model system, exhaust gas treatment system, SF₆ gas filling system, dynamic gas distribution system, pressurized gas charging system, gas detection system, gas storage tank and intelligent control system
Membrane separation technology or cryogenic solidification separation technology is used to separate the SF₆ mixed gas, and the N₂ gas is discharged into the atmosphere in a high-purity state after being cycled and infiltrated

project	Specifications
Model		JHHG10-HQ1	JHHG20-HQ1	JHHG30-HQ1
Mixing ratio detection (built-in)	detection object	SF₆/N₂
	Detection range	0～100%（volume fraction）
	detection accuracy	±0.5%（volume fraction）
	resolution	±0.01%（volume fraction）
SF₆ exhaust gas detection (built-in)	Detection sensitivity	≤1μL/L
	measurement error	≤±5%
Gas filling	Valve concentration range	0-100%
	Optional valve gas	SF₆or SF₆+N₂ or SF₆+CF₄）
	matching accuracy	±0.5%（V/V%）
	valve flow	≥15m³/h	≥30m³/h	≥45m³/h
	O₂ mixing amount (volume fraction)	Not higher than 0.05%
	filling pressure	1.5 MPa